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PLASMA TECHNIQUE - PLASMA TECHNOLOGY
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[ ETCHING OF SURFACES ]
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Etching of the surface with a reactive process gas.
Material is removed, vaporized and sucked off. Therefore
the surface area is enlarged.
Applicationso plasma etching:
- e.g. structuring of silicon
- Good adhesion of finish and glue on high temperature resistive
plastics like PTFE, PFA and FEP.
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Silicon with etching mask before plasma treating
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Plasma treatment |
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Afther the plasma treatment |
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| Example POM: Before plasma treating |
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After plasma treating |
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| Example PTFE: Before plasma treating |
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After plasma treating |
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Applications:
- Structuring of Silicon
- Etching of PTFE
- For adhesion with paint and glue on plastics resistant to high temperatures, ie. PTFE, PFA, FEP
- Photoresist ashing
Materials / Parts:
- Components (Semiconductors)
- Brackets (Dentistry)
- Pacemakers (Medical)
- Sensors
Uses in Industry:
- Automobile
- Joint / sealant maufacturing
- Electronics
- Research Institutes
- Semiconductor technology
- Medical Technology
- Micromechanic manufacturing
- Sensor technology
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