STANDARD PLASMA SYSTEMS

[ PIRANI VACUUM METER FOR PLASMA CLEANER ]

• Ascertainable pressure range
  from 10-² to 10 mbar
  Absolute tolerance more than 5 %
• Analogue output 0 to 10 volts
  according to the three measurable
  pressure decimal units gauged
  (0.01 mbar = 0V; 0.1 mbar = 3.3V;
  1 mbar = 6,6V; 10 mbar =10V)
• Switching output for process clearance
  (min/max pressure) chargeable
  up to 230V AC/1A.
  Default parameters by an internal
  setting regulator or by SW is possible
• Controller for stand-alone operation and
  operation initiated in the process
  control are possible
• Interface: LAN (RJ45) and USB 2.0 and
  others usable for SW updates. RS485 is
  only available for "embedded mode"
  in process control
• Due to the electromechanical construction
  of the sensor head (0.1 mm wire
  from a platinum alloy), it is very robust
  against chemical and high frequency influence
• Correction of pressure characteristics
  for various gases by a DIP switch or
  SW is possible (still in development)
• Supply voltage: 88-264 VAC/47 - 63 Hz
  or for "embedded mode" 15-24 V DC
• Power input approx. 5 W
• Power plug: IEC
• Weight: approx. 1.5 kg, sensor
  head approx. 400 g
• Size: 19 inch drawer; 3 HE