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Technical Data:
Plasma etcher TETRA-30-LF-PC
switchgear cabinet:
W 600 mm, H 800 mm, D 650 mm
chamber:
W 305 mm, H 300 mm, L 370 mm
(optional: L 625 mm)
chamber volume:
approx. 34 litres
gas supply:
3 gas channels through MFC
generator:
40kHz/0-1000 W
(optional 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type D16B (25 m³/h)
trays:
up to 6 trays
(optional: rotary drum)
control:
PC control (Windows)
options / accessories
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Plasma system TETRA-30-LF-PC: With PC-control. Build for production,
cleaning, activation, etching. |
