Technical data:
Femto PCCE
switchgear cabinet:
B 562 mm, H 211 mm, T 420 mm
chamber:
Ø 100 mm, L 280 mm
chamber volume:
ca. 2,8 litre
gas supply:
2 pcs. gas channels through MFC
generator:
40kHz/100W, infinitely
vacuum pump:
Leybold, Typ S1,5 (1,5m³/h)
tray
:
1 pc. tray
control:
PC control
options / accessories
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Plasma system FEMTO PCCE (front) : Process development, cleaning, activating, etching (small series)
Plasma system FEMTO PCCE (back)
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