| |
PLASMA SYSTEMS - CONTROL
|
| |
[ DIFFERENT CONTROLS - PC CONTROL FOR PLASMA CLEANER - PLASMA ETCHER - PLASMA ASHER - PLASMA ACTIVATION ]
|
| |
|
| |
Our software is designed for the special requirements of
plasma technology.
- easy to use
- visualization of the systems on screen
- automatic control of all relevant parameters
- monitoring of all relevant parameters
- data logging of all relevant parameters
- batch- and user- documentation
|
| |
|
| |
|
| |
|
| |
Software control - main menu
for PC-controlled systems |
| |
|
| |
Functions of the PC control:
- The control is based on personal computer with an industrial
field bus
- PC, monitor an keyboard are build in the switch cabinet
- Galvanic isolation of all input and output channels for safety
reasons
- Software runs with Windows
- Two modi:
- Manual operation
- Automatic operation
- Parameters:
Process start pressure
Max. evaluation time
Gas mass flow ( ratios )
Pressure stabilisation time
Pressure
HF-power
Flushing time
Ventilation time
Temperature
Devitation limits for:
- Pressure
- Mass-flow
- HF-power
- Temperature
- 100 automatic programs can be stored
- Digital pressuer regulation with PID-regulator
- Graphic display of process parameters
- Process data can be stored as an Excel-file
- Protocol-diagram can be printed (with every printer)
- Netcard can be installed (no need)
- Signal lamp for precess end
- Network card
|
| |
|
